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DE400 Thermal Evaporative Film Deposition System
DE400热蒸发薄膜沉积系统001
DE400热蒸发薄膜沉积系统002
DE400热蒸发薄膜沉积系统022
DE400热蒸发薄膜沉积系统001
DE400热蒸发薄膜沉积系统002
DE400热蒸发薄膜沉积系统022

DE400 Thermal Evaporative Film Deposition System

Stainless steel cavity, open the door before sealing by rubber ring, equipped with molecular pump or condensate pump and dry pump and corresponding valves, full range vacuum gauge, multiple sets of evaporation sources, crystal film thickness control, PLC and industrial computer control

Configuration and overview:
Stainless steel cavity, open the door before sealing by rubber ring, equipped with molecular pump or condensate pump and dry pump and corresponding valves, full range vacuum gauge, multiple sets of evaporation sources, crystal film thickness control, PLC and industrial computer control

Options:
      The substrate can be up to 8 inches
      The substrate can be heated to 950 degrees
      The substrate can be cooled and temperature controlled by liquid nitrogen
      The substrate can be rotated
      Ion source cleaning or auxiliary deposition
      The substrate oxidation process
      Substrate pre-cleaning
      LOAD LOCK
      Glove box
      Vacuum interconnection or vacuum robot substrate transfer

Features:
      It is convenient for operation and maintenance inside the cavity
      High vacuum or ultra-high vacuum
      Vacuum quickly
      The film thickness and rate have high resolution, and the film thickness meter controls the corresponding parts to accurately control the film thickness and rate
      Good film thickness uniformity
      Fully automatic control
      Use preferred components
      Thoughtful after-sales service

application:
      Deposited metals include single or multilayer films of magnetic materials, semiconductors, or dielectric materials
      LIFT-OFF process thin film deposition
      Used for thin film deposition of two-dimensional materials, quantum devices, superconductors, semiconductors, nano devices, optoelectronics, biological and other materials, etc.

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