(+86)10-67832716/17

Your location:
Homepage
/
/
/
DE600C Electron Beam Evaporation system
DE600三(四)电子枪电子束蒸发薄膜沉积系统011
DE600三(四)电子枪电子束蒸发薄膜沉积系统011

DE600C Electron Beam Evaporation system

The DE600C Electron Beam Evaporation system is assembled with triad e-beam source, it can be used to evaporate metals, semiconductor or insulation materials on the substrate

The DE600C Electron Beam Evaporation system is assembled with triad e-beam source, it can be used to evaporate metals, semiconductor or insulation materials on the substrate.

Features Evaporation Chamber and Load Lock chamber isolated by gate valve (option)
Evaporation Chamber with front O-ring sealing door for easy inside operation, all other ports are metal sealing
Substrate shutter is Closed Loop controlled to open/close by Thin Film Controller
Optional RF Plasma substrate Cleaning or Ion Gun substrate Cleaning in the Load Lock
Optional substrate oxidation in the Load Lock
System safety Interlock 
Total Auto Control or manual operation by desktop computer

 

 

 

 

 

 

 

 

 

 

 

Typical Application For R & D Thin Film Deposition 
Ideal tools for LIFT-OFF process
Evaporate metal, Semiconductor or Insulation Materials
Evaporate Magnetic Materials

 

 

 

 

 

Configuration

Evaporation Chamber 304 stainless steel chamber of front open door with viewport
Vacuum Pumping Cryopump or Turbo pump and dry rough pump
Vacuum Valve Pneumatic valves
Vacuum Gauging Wide range vacuum gauge and rough gauge
Evaporation Source Triad e-beam sources
Top mounted rotary sample stage
Sample Stage

Side mounted tilt and rotary sample stage

(option heating to 600C)

(option cooling to -150C)

Film Control Crystal Film Rate and Thickness Monitor and Control
Load Lock Chamber (Option) 304 stainless steel chamber of front open door with viewport

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Specification

The Base Vacuum Pessure 5E-8 Torr
Sample Loading Capacity One Max. 4 inch flat substrate or many smaller
Film Uniformity +/-2% on 4” rotating substrate (2000A Ti film)
Rate Resolution 0.1 Angstroms/sec

 

Product description

相关产品

There is currently no content to display
Please add data record on website background.

 COPYRIGHT© 2020 Beijing Deyi Tianli Technology Development Co., Ltd. All rights reserved ICP05065635  Website construction:www.xinnet.com

德仪科技
德仪科技