Beijing Deyi Tianli Technology Development Co., Ltd.

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Beijing Deyi Tianli Technology Development Co., Ltd.

Beijing Deyi Tianli Technology Development Co., Ltd. specializes in providing technical services for PVD-magnetron sputtering equipment, electron beam evaporation thin film deposition equipment, thermal evaporation thin film deposition equipment and related products.

The equipment is mainly used for scientific research and mass production in universities, scientific research institutes and production enterprises. It plays a central role in the research and production of semiconductors, microelectronics, nanotechnology, quantum science, data storage, superconducting electronics, optoelectronics and biological thin film materials.

Advanced Configuration

High-grade indicators

superb performance

Highly stable

High quality film

High-end services

DE3000 Cluster high vacuum multi chamber nano thin film deposition system

The DE3000 Cluster contains multiple process chambers for depositing metal, semiconductor, and dielectric materials. Optional magnetron sputtering, electron beam evaporation, thermal resistance evaporation, ion beam cleaning or assisted deposition process. Single-layer film, multi-layer film, or alloy film can be deposited, which can be used for nano thin film material development and mass production. Suitable for FAB hundred level purification room, unmanned workshop.

DE4500 Magnetron Sputtering and Evaporation Thin Film Deposition System

The DE4500 magnetron sputtering and evaporation thin film deposition system includes a sputtering chamber, an electron beam and thermal evaporation chamber, and a sample chamber. It can be used to sputter or evaporate metals, semiconductors, media and low-temperature organic materials, and is used to prepare single-layer or multi-layer films. Materials are ideal platforms for materials and thin film research in universities and research institutes

DE500DL nano-film magnetron sputtering system

The DE500DL nano-film magnetron sputtering system is equipped with multiple magnetron sputtering sources, which can deposit metal, semiconductor and dielectric materials. It can be used for sputtering multilayer films, co-sputtering alloy films, reactive sputtering, etc. It is an ideal platform for materials and thin film deposition research and development and pilot testing.

DE500DL superconducting quantum magnetron sputtering system

The DE500DL superconducting quantum magnetron sputtering system is equipped with multiple magnetron sputtering sources, which can deposit metal, semiconductor and dielectric materials. It can be used for sputtering multilayer films, co-sputtering alloy films, reactive sputtering, LIFT-OFF process films, tunnel junction films, etc. It is an ideal platform for materials and thin film deposition research and development and pilot testing.

DE400DHL electron beam evaporation coating system

The DE400DHL electron beam evaporation coating system is equipped with a multi-crucible electron beam evaporation source, which can evaporate and deposit metal, semiconductor or dielectric materials on the substrate. It is an ideal platform for preparing lift-off process thin films and low micro materials.

DE400DUL ultra-high vacuum electron beam evaporation coating system

DE400DUL ultra-high vacuum electron beam evaporation coating system is equipped with a multi-crucible electron beam evaporation source, which can evaporate and deposit metal, semiconductor or dielectric materials on the substrate. it is an ideal platform for preparing lift-off process thin films and low micro materials.