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DE600CL multi-electron gun evaporation coating system

DE600CL multi-electron gun evaporation coating system is equipped with three (four or six) electron beam evaporation sources, which can co-evaporate metal, semiconductor or dielectric materials on the substrate.

 

Features

Open the door before the rubber ring of the evaporation cavity is sealed to facilitate the operation inside the cavity.

The opening of the substrate baffle is controlled by the film thickness meter closed loop.

Optional RF plasma or ion source substrate cleaning

Optional Substrate Oxidation

System Safety Interlock

Computer controlled fully automatic or manual operation

Typical applications

For thin film deposition R & D

Ideal platform for LIFT-OFF process

Evaporatable metal, semiconductor or dielectric materials

evaporable magnetic material

Multi-source co-evaporation

 Main Configuration

evaporation chamber 304 stainless steel, front door with viewing window
Vacuum pump Evaporation chamber equipped with molecular pump or condensate pump and oil-free mechanical pump
Vacuum valve Pneumatically controlled high vacuum valve
Vacuum measurement Wide range vacuum gauge for measuring vacuum and rough draw gauge
evaporation source Three (four or six) electron beam evaporation sources
Sample table

Rotation substrate table

Selectable Tilt and Rotary Substrate Table

(Optional heating to 600 ℃)

(Optional cooling to -150 ℃)

Film thickness detection Crystal Oscillator Rate Film Thickness Monitoring
Pre-vacuum sample chamber Single or multiple substrate loading capability

 Main technical indicators

ultimate vacuum degree 3E-8Torr
Substrate Size Optional: 2 inches, 4 inches, 6 inches, 8 inches, 12 inches
film thickness uniformity Better than +/-3%
Evaporation rate resolution 0.01 A/s
Film thickness resolution 0.1A

 

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